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KMID : 1059519980420050526
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Journal of the Korean Chemical Society
1998 Volume.42 No. 5 p.526 ~ p.530
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Analysis of Trace Impurities in The Bulk H2 and He Gases by a Cold Concentration Method
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Lee Taeck-Hong
Park Doo-Seon
Son Moo-Ryong
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Abstract
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Analysis of trace impurities in the gases has been very important with the development of semi-conductor related industry. Particularly, the contamination of the gas handling systems in a semi-conductor plant by the air has been a trouble to the manufacturers. Thus, the analysis of the air components in the system has been a task to the analysts. In this study, we report the analysis data with a expanded uncertainty for the trace impurities of nitrogen and argon in the bulk helium and hydrogen. All data show a good correspondence, exhibiting reliable statistical error ranges.
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